Teledyne Stud Sensor 452 Instrukcja Użytkownika Pobierz pdf (Strona 10)

Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E

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1 Product Descriptions

1.1 M452 Process Ozone Sensor

The Teledyne API M452 is a microprocessor-based sensor for measuring

the concentration of gaseous ozone in processes such as semiconductor

wafer fabrication, water treatment, and ozone research. The M452 can be

used as a full flow process sensor or as a sensor to monitor a small flow of

gas diverted from a process stream.

The M452 features a standard 0-5 volt analog signal for reporting process

concentration as well as 4 digital status outputs for sensor diagnostics. A

bi-directional serial interface is also provided for computer control.

The M452 operates from an external +15 vdc power source.

1.2 M452 High Purity Process Ozone Sensor

The M452A High Purity Process Ozone Sensor includes a 316L manifold

with a 10Ra finish. ¼” VCR face seal fittings are standard.

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